3D System-on-Chip technologies for More than Moore systems
Abstract:
3D integration is a key solution to the predicted performance problems of future ICs as well as it offers extreme miniaturization and cost-effective fabrication of More than Moore products. Through silicon via (TSV)technologies enable high interconnect performance compared to 3D packaging. At present TSVs are associated with a relatively high fabrication cost, but research world wide strive to bring the cost down to an acceptable level. An example of a 3D System-on-Chip (3D-SOC) technology is to introduce a post backend-of-line TSV process as an optimized technology for heterogeneous system integration. The introduced ICV-SLID process, that combines both TSVs and bonding, enables 3D integration of fabricated devices. Reliability issues related to thermomechanical stress caused by the TSV formation and the bonding are considered. 3D-SOC technology choices made to realize a heterogeneous ultra-small IC stack for a wireless tire pressure monitoring system (TPMS) as an automotive
application are described.
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